Poly (1H, 1H, 2H, 2H-perflorodecyl Acrylate) (PPFDA) and poly (2- (diisopropylamino)ethyl methacrylate) (PDPAEMA) thin films have been successfully deposited on different surfaces by using hot filament chemical vapor deposition method. The chemical structure of deposited films was examined by Fourier Transform Infrared Spectroscopy and X-Ray Photoelectron Spectroscopy analyses. PPFDA and PDPAEMA films were deposited with 22 and 38 nm/min deposition rates respectively at low filament temperatures. The surfaces which were coated with PPFDA showed hydrophobic or superhydrophobic properties, while the surfaces coated with PDPAEMA films showed fast and reproducible pH induced changes in their wetting behaviors. According to the AFM results, as-deposited PPFDA film showed granular morphology which provide surface roughness. Because of that nano roughness, flat smooth surfaces coated with PPFDA films showed static water contact angles as high as 1400. The micro rough surfaces coated with PPFDA surfaces showed superhydrophobic behaviour with contact angles as high as 1600. As-deposited PDPAEMA thin films on flat Si surfaces showed a reversible switching of water contact angle values between 870 and 280, after successive treatments of high and low switching pH water solutions, respectively. Same process for PMMA fiber mat showed a contact angle values between155±30 and 22±500.